Molecule Delivery from Source to Chamber
Ceres offers a comprehensive portfolio of molecule delivery system to support virtually all electronic specialty gas supply applications from source to chamber in semiconductor and adjacent industries
Explore our comprehensive range of molecular delivery systems tailored to your industry needs
- Specialty Gas Delivery Systems
- Liquid Delivery Systems
- Vapor Delivery Systems
Specialty Gas Delivery Systems
NanoPurge is our product family of fully automated hazardous gas cabinets and valve manifold boxes, engineered for the safe and precise delivery of ultra-high purity (UHP) specialty gases from cylinders to points of use in semiconductor fabs and other high-tech industries.
Designed to handle a wide range of hazardous production materials (HPMs), NanoPurge systems support everything from lecture bottles to bulk cylinders, including multi-cylinder pallets. Each system is built to meet stringent safety and industry standards, including SEMI certifications, CGA G-13 guidelines, and Class 1 Division 2 compliance.
Whether for single process tools or complex gas distribution networks, NanoPurge provides flexible, code-compliant solutions for high-purity gas delivery with maximum operational safety
Bulk Specialty Gas Systems (BSGS)
Gas Cabinets and VMBs
Other
Liquid Delivery Systems
ChemSource Series
ChemSource is our advanced line of liquid precursor delivery systems designed for precision chemical supply in Thin Film Deposition, Coatings, and Material Synthesis processes. These systems enable safe, automated, and continuous delivery of high-purity chemicals to various points of use, such as bubblers, DLI vaporizers, or vapor draw systems.
Available in both bulk and mini-bulk configurations, ChemSource systems are built to support operations requiring vessel sizes from 10 liters up to 200 liters. Whether you need uninterrupted supply via auto-switching dual-vessel systems or more compact solutions for low flow or scheduled refill applications, ChemSource offers flexibility and reliability across your process needs.
Flexible Configurations:
Precursor Vapor Delivery Systems
Ceres offers a complete portfolio of precursor vapor delivery solutions designed for precision, flexibility, and reliability in semiconductor fabs and other CVD industry applications. From the chemical source to the process chamber, our systems cover the full spectrum of vapor generation, blending, and flow control technologies.
Our vapor delivery solutions support a wide variety of precursor sources, including bulk and mini-bulk liquid systems, returnable-service pressure vessels, and refillable stationary vessels. At the core of every system is a vapor generator carefully matched to the application—whether it's bubblers, bubbler/evaporators, flash evaporators, direct liquid injection (DLI), or liquid/solids vapor draw.
