The NanoPurge® VMB is a fully automated valve manifold box designed for distributing electronic specialty gases from a single or optional dual cylinder source to multiple points of use.Featuring one source gas inlet and up to eight modular branch manifolds, each stick includes valve isolation, pressure regulation, pressure sensing, purge/evacuation, and coaxial monitoring—ideal for handling hazardous gases. Modular design allows customization based on the number of required outlets. The NanoPurge® VMB is our premier solution for low-flow gas distribution.
Why choose NanoPurge® VMB?
- Safe & centralized precursor delivery
- Lowest total cost of ownership
- Stable vapor concentration at dynamic flow rates
- Highest availability through redundancy solutions
- VaporStation® is SEMI compliant.
Applications
VaporStation® is an enhanced solution for semiconductor fabs, offering precise and efficient bulk vapor delivery to multiple point of use. Designed to meet the rigorous demands of semiconductor manufacturing, this system ensures consistent and accurate vapor concentration, supporting various processes such as CVD, ALD or EPI.
Features
- Real-time monitoring of concentration and flow
- Fully automated operation
- State-of-the-art PLC
- Bubbler temperature control
- User-friendly interface
Download Brochure
Download Brochure
- Filename
- Ceres-NanoPurge-Valve Manifold Box.pdf
- Size
- 904 KB
- Format
Contact our experts
Reach out to our expert teams today to discover how VaporStation® can revolutionize your vapor delivery processes.