ChemSource™ 250 is a dual vessel, auto-switch precursor liquid delivery system that houses two returnable-service pressure vessels up to 38 liters. The auto-switch configuration provides continuous, uninterrupted supply of chemical from the sub fab to 1 to 5 points of use. Each vessel rests on a scale that measures its “productˮ weight during operation. When signaled, an operator can perform a userprompted procedure to replace an empty vessel.
Why choose ChemSource™ 250?
- Fully automated, sized for sub fab liquid delivery for most deposition chemistries
- Full spill containment and safety features for corrosive and flammable deposition chemistries
- Part of turnkey bulk delivery from source to POU
- User friendly software used in our full portfolio
- SEMI S2 compliant and QMS ISO9001-2018
Applications
ChemSource™ 250 is ideal for sub fab delivery of liquid precursors. It is best suited, and sized for, CVD processes with low chemical flow demand. ChemSource™ 250 can be configured as a buffer refill system, called ChemSource™ 225 with the addition of two fixed pressure vessels. An offline, empty vessel is vented, then refilled from a bulk LDS upstream. This eliminates the need for any operator interaction in the sub fab.
Features
- Fully automated, auto-switch operation
- 1/4ˮ UHP Plumbing with process valve cluster and two flexible vessel pigtails
- On-board maintenance circuits for push gas, purge gas, vent and vacuum functions
- Optional de-bubbler and 5 stick VMB
- Optional fixed vessels for auto buffer refill
- Safety-rated for flammables and pyrophorics
Download Brochure
Download Brochure
- Filename
- Ceres-ChemSource 250-Liquid Delivery System.pdf
- Size
- 804 KB
- Format
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