SMR™ is our patented “Self-Metering Reservoirˮ vapor generator. The SMR refills itself in real time to maintain a constant liquid level without the use of any liquid level control electronics. The SMR can be configured as a bubbler or flash evaporator, and can be integrated into process tools or purchased as part of a Ceres stand-alone vapor delivery system. The SMR requires pressurized liquid precursor to refill while delivering vapor. An SMR controller is also available to support its vapor generating functions.
Why choose SMR™?
- On-demand of vapor supply to multiple MFCs
- Configurable as bubbler or flash evaporator
- Supports long process runs that require continuous, steady state supply of vapor.
- Generates up to 250 gr/min SiCl4 neat vapor
- Up to 20 slpm carrier gas bubbler vaporsupply
- Proven, patented design over 25 years
Applications
SMR™ enables remote supply of vapor on demand to one or more MFCs, or process tools. SMRTM is an alternative to direct liquid injection where vapor stream temperature is <125C, and less than 20 slm vapor flow rate, whether bubbler or neat vapor generation, for precursors such as such as TCS and SiCl4, among many others.
Features
- 3ˮ diameter vessel with 2.5ˮ, selfmetering refill inner float vessel.
- Ports for liquid fill, carrier gas downtube, vapor outlet, vapor pressure, immersion heater, Liquid RTD, heater core TC, overfill sensor.
- Inner vessel stem tip needle valve and priming magnet (used for chemical commissioning)
- Flanged head and base for SMR maintenance
Download Brochure
Download Brochure
- Filename
- Ceres-SMR Self-Metering Reservoir.pdf
- Size
- 822 KB
- Format
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