ChemSource™ 2100 is a fully automated, dual-vessel, auto-switch bulk liquid precursor delivery system designed for use with returnable-service 200- liter pressure vessels. It delivers chemical to one or more points of use via pressure dispense and continuously monitors vessel weight to ensure reliable supply.
When a vessel is empty, the system alerts the user and provides guided, user-prompted steps for a safe and efficient change-out. ChemSource can also be configured as a buffer refill system fed from an ISO tanker bulk source.
Why choose ChemSource™ 2100?
- Continuous, uninterrupted supply of precursor chemicals
- Safe, remote, operation due to single point of supply
- Reduced frequency of vessel changes due to bulk capacity
- Lower cost of operations from single point of chemical handling
- SEMI S2 compliant and ISO9001-2018
Applications
ChemSource™ 2100 is ideal for bulk refill and supply to sub-fab liquid or vapor precursor delivery systems. It supports both high-use, continuous demand environments and processes with low or periodic chemical usage. The system is also well-suited for feeding POU buffer refill vessels, providing a reliable and efficient solution for a wide range of chemical delivery requirements.
Features
- Dual 200 liter liquid precursor chemical delivery
- Auto-switch, bulk pressure dispense of UHP precursor chemicals
- PLC control with menu driven touch screen
- Outlets for up to three points of use
- Fire safety features available for flammable chemicals
Download Brochure
Download Brochure
- Filename
- Ceres-ChemSource 2100-Bulk Liquid Delivery System.pdf
- Size
- 1 MB
- Format
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