NanoPurge MultiPure™ is a fully automated point of use purifier system for multiple specialty gases. Its modular design houses up to nine (9) returnableservice gas purifiers, which can be specified by gas name and flow rate capacity. Up to three (3) exhausted enclosures are available for different hazard classifications and purifier sizes to optimize system footprint.
The controller enables easy set-up of for the userdefined configuration and gases specified. MultiPure™ supports purifier sizes up to 2500 slpm each.
Why choose MultiPure™?
- Single-point system for up to 9 purifiers
- Automates and consolidates management of gas purifiers
- Itʼs a safer and lower COO sub fab solution
- Configurable for spec gases and flow rates
- Assures ultra pure, dry process gas to the process tool
Applications
MultiPure™ is ideal for HPM room or sub-fab installations to support ultra-pure nano-scale process gas supply. It serves as a unique solution for integration of multiple hazardous gas purifiers into one automated system.
It reduces installation cost and footprint by supporting up to nine gases purifier circuits in one automated system.
Features
- User defines up to 9 purifiers by gas and flow
- Supports GateKeeper® GPU gas purifiers
- Gas cabinet compartments by classification
- Designed for safe, easy purifier replacement
- Manufactured to SEMI S2 & ISO 9001-2018
Download Brochure
Download Brochure
- Filename
- Ceres-MultiPure-Purifier System.pdf
- Size
- 830 KB
- Format
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