VaporMerge™ Distribution Valve Box (DVB) efficiently combines vapor streams from up to four VaporStations into a single distribution outlet, enabling higher flow rate capacity and enhanced system redundancy. This design supports reliable, fab-wide delivery of vapor to CVD processes. VaporMerge™ also ensures balanced flow rate utilization and consistent vapor concentration across all connected VaporStations operating in parallel. The result is uninterrupted vapor availability, high-capacity flow, and precise vapor concentration from a remote supply source.
Why choose VaporMerge™?
- Enables fab-wide bulk supply of precursor vapor for GaN, SiC, and Epi.
- Remote solution for fabs with restrictions onhazardous precursor chemicals in fab.
- SEMI compliant.
Applications
The system delivers fab-wide CVD precursor vapor supply for GaN, SiC, and Epi processes. It enables safe, single-point bulk liquid-to-vapor delivery, simplifying supply and logistics. As a remote solution, it suits fabs with restrictions on hazardous precursors in cleanroom areas. It also provides a reliable alternative to on-tool bubbler circuits, reducing the need for frequent change-outs and minimizing downtime.
Features
- Combines up to four VaporStations to deliver 80 slpm total flow.
- Fully automated system runs continuously without operator input.
- Realtime display of vapor concentration.
- Integrated plumbing supports flow balancing, purge, and vent/vacuum functions.
- Supports up to two high-capacity outlets for flexible vapor delivery.
Download Brochure
Download Brochure
- Filename
- Ceres-VaporMerge-Distribution Valve Box.pdf
- Size
- 928 KB
- Format
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