ChemSource™ CSS is a fully automated auto-switch “Central Supply Systemˮ for transfer and delivery of liquid precursors from two Iso tankers or portable bulk pressure vessels to buffer supply liquid delivery systems delivery systems in a sub fab.
ChemSource™ CSS measures the chemical weight of each vessel, and auto-switches from the empty vessel to a full, standby vessel for continuous, uninterrupted bulk supply.
Why choose ChemSource™ CSS?
- Economy of scale solution for fab-wide supply Bulk liquid precursors
- Part of turnkey bulk delivery from source to POU
- Remote, safe, and single-point, operator interaction for vessel changes
- User friendly software used in our full portfolio
- SEMI S2 compliant and QMS ISO9001-2018
Applications
ChemSource™ CSS is ideal for fab-wide liquid precursors distribution to multiple points of use. Turnkey supply systems can be configured for redundancy and bypass functions to assure uninterrupted supply to all points of use. Wellsuited of silicon precursors such as SiCl4 and MTS CVD processes with high chemical consumption rates.
Features
- Fully automated, auto-switch operation
- 1/2ˮ UHP Plumbing with process valve cluster
- Application-specific vessel valved pigtails and pigtail boxes at point-of connection
- On-board maintenance circuits for push gas, purge gas, vent and vacuum functions
- Safety-rated for flammable chemicals
Download Brochure
Download Brochure
- Filename
- Ceres-ChemSource CSS-Liquid Delivery System.pdf
- Size
- 818 KB
- Format
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