NanoPurge® BSGS is a fully automated, single source, high pressure, high flow rate, specialty gas delivery system. With up to 1,000 slpm of flow rate capacity, NanoPurge® BSGS can support many points of use. The NanoPurge® BSGS is intended to be paired with a companion system to provide auto-switch operation, full redundancy, and manual cross-over plumbing to connect to the companion bulk source, in the event of any kind of failure of the companion system.
Why choose NanoPurge® BSGS?
- 10 years of performance and reliability
- Economy of scale solution for fab-wide delivery
- Rated for C1/D2 and CGA 13 Installations
- Full redundancy when installed as a pair
- Part of turnkey bulk delivery from source to POU
- User friendly software used in our full portfolio
Applications
NanoPurge® BSGS serves fab-wide delivery of high pressure, bulk specialty gases such as SiH4 and NF3, used in semiconductor, solar, and display processes that consume gas at high flow rates or many points of use in the fab.
Reliability and redundancy are prerequisites of fabwide gas supply, and dual NanoPurge® systems combine the key ingredients to meet safety, flow rate demand, and production uptime.
Features
- Cabinet or Rack design for indoor/outdoor
- High pressure, high flow rate, valve design
- ¾” UHP Plumbing with on-board JT Heater
- Manual cross-connect for back-up operation
- Safety-rated for flammables and pyrophorics
- Source pigtail isolation box – (not shown)
Download Brochure
Download Brochure
- Filename
- Ceres-NanoPurge-Bulk Specialty Gas System.pdf
- Size
- 989 KB
- Format
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