Our Bulk Vapor Delivery System (BVDS) offers an innovative solution for on-demand vapor generation and distribution to multiple points of use.
Capable of delivering vapor at flow rates of up to 80 slpm, VaporJet™ BVDS enables efficient bulk vapor distribution to multiple semiconductor CVD reactors—providing a streamlined alternative to traditional vapor MFCs for reactor vapor delivery.
Why choose VaporJet™ BVDS?
- Eliminates need for on-tool DLI Vaporizers
- Size and cost reduction of CVD Tools PDS cabinets
- Safer by eliminating liquid precursor supply to fab
- Instant response from process MFC
- VaporJet is SEMI compliant
Applications
VaporJet™ is ideal for applications requiring highflow rate vapor generation and supply, such as in semiconductor manufacturing and other precision processes. Its stand-alone, automated design enables seamless vapor delivery to multiple points of use (POUs).
Additionally, it serves as a powerful alternative to traditional on-tool DLI vapor delivery, offering enhanced control and scalability for complex industrial applications. VaporJet core technology of BVDS.
Features
- Fully automated supply of bulk vapor
- 2 Direct Liquid Injection (DLI) Vaporizers
- Verification of pre-mix vapor concentration
- Validation of process vapor concentration
- Proprietary Hot Box Thermal Management
Download Brochure
Download Brochure
- Filename
- Ceres-VaporJet-DLI Vaporizer.pdf
- Size
- 891 KB
- Format
Contact our experts
Reach out to our expert teams today to discover how VaporStation® can revolutionize your vapor delivery processes.