The Ceres Gas Isolation Box (GIB) serves as a Gas “Circuit Breaker Boxˮ near the process tool. The Floor-Mounted GIB fits in 2ʼ x 2ʼ raised floor panel. The GIB gives tool owners control to manage their own maintenance schedules, with no need to contact Facilities. The GIBʼs configurable design can manifold and distribute one or more source gases to feed multiple chambers, with up to 9 sticks for low flow gases and 6 sticks for high flow gases. A hinged, plexiglass cover enables engineers to see inside.
Why choose Floor-Mount GIB?
- Local control and isolation of hazardous gases
- Ideal for splitting gases to feed multiple chambers
- Gives process tool owner control of gas supply and maintenance
- Moves VMB stick function to the point of use
- Reduces VMB pipe runs and related cost
Applications
- Point of use gas isolation and safety for process tool gas supply and isolation
- Point of use splitter for process gases to feed the same gas to multiple chambers
- Enables control, isolation, and maintenance of gas supply at the tool versus the sub fab
- Gas isolation and maintenance can be gas specific and chamber-specific
Features
- Fits in 2’ x 2’ raised floor near process tool
- Hinged, clear cover for access and viewing
- Inlet splitter manifolds are configured for quantity of sticks required
- Gas and chamber-specific supply isolation
- All facilities connections are below the floor
- Point-of use pneumatic valve control (opt)
- Safety - exhaust monitoring and UV/IR (opt)
Download Brochure
Download Brochure
Floor-Mount Gas Isolation Box (GIB) Datasheet Including Overview, Key Features, and Applications
- Filename
- Ceres-Floor-Mount GIBs.pdf
- Size
- 835 KB
- Format
Contact our experts
Reach out to our expert teams today to discover how VaporStation® can revolutionize your vapor delivery processes.