ChemSource™ 1100 is a single-vessel, pressure dispense, bulk precursor liquid delivery system.
ChemSource™ is fully automated and supplies chemical to a downstream liquid or vapor delivery system with buffer refill canister. ChemSource™ measures the chemical weight and alerts when it is time to change out the vessel when at a low liquid level. A returnable service pressure vessel, up to 200 liters, is specified and supplied by the customer.
Why choose ChemSource™ 1100?
- Fully automated, bulk supply reduces vessel changes and adds safety in use
- Full spill containment and safety features for corrosive and flammable chemicals
- Part of turnkey bulk delivery from source to POU
- User-friendly software used in our full portfolio
- SEMI S2 compliant and QMS ISO9001-2018
Applications
ChemSource™ 1100 is ideal for supplying precursor chemicals to systems equipped with buffer refill vessels. This allows for vessel change-out without causing production downtime.
ChemSource™ 1100 is well suited for processes with low chemical consumption or periodic demand, ensuring efficient and reliable delivery without frequent operator interaction.
Features
- Single source chemical containment cabinet houses vessels up to 200 liters
- 1/4” UHP Plumbing with process valve cluster and two flexible vessel pigtails
- On-board maintenance circuits for push gas, purge gas, vent and vacuum functions
- Safety-rated for flammables and pyrophorics
Download Brochure
Download Brochure
- Filename
- Ceres-ChemSource 1100-Bulk Vapor + Liquid Delivery System.pdf
- Size
- 963 KB
- Format
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