Pureblend™ is a fully automated specialty gas mixing system designed to blend two gases at a precise ratio for on-demand delivery to multiple process points in semiconductor fabs. It receives source gases from gas cabinets, non-hazardous cylinder panels, or bulk specialty gas systems. Dual MFC circuits mix and fill an onboard pressurized cylinder, supplying gas as needed to process equipment. Gas concentration is measured and verified to ensure it meets specification. Pureblend™ provides up to 500 liters of flow capacity to support multiple points of use.
Why choose Pureblend™?
- Meets or exceeds premixed cylinder gas specifications
- Reduces cost and accelerates ROI by onsite gas blending
- Enables POU concentration control for process refinement in the fab
- Fully automated “set and forgetˮ operation minimizes operator intervention
- Manufactured to the SEMI S2 & CGA G-13 Standards
Applications
Pureblend™ is an economical alternative to pre-mix cylinder-gas delivery by producing precision, user-defined binary gas mixtures on site. It offers higher flow rate capacity for mixtures such as H2 and N2 forming gas to support multiple points of use, but can also be configured for applicationspecific, process-critical mixtures. An on-board gas concentration sensor provides real-time confirmation that the mixture is in within spec.
Features
- Blends two process gases to a precise, real time gas concentration.
- Supports up to 500 slpm flow rate
- Fully Automated PLC & Concentration Control
- On-board maintenance purge/evac and safety interlocks
- Available Options: Gas and flame detectors
Download Brochure
Download Brochure
- Filename
- Ceres-Pureblend-Gas Mixing System.pdf
- Size
- 801 KB
- Format
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