LumiSource™ BSGS 3000 is a fully automated, low pressure, high flow rate, auto-switch, bulk specialty gas delivery system from y cylinders or ISO tanks.
With 1ˮ plumbing, on-board gas line heating, and single stage pressure regulation for low pressure source gases. LumiSource BSGS 3000 supports flow rates up to 3,000 slpm NH3. LumiSource BSGS 3000 is often purchased in pairs to provide full redundancy, increased capacity, and cascade switching from four bulk gas sources.
Why choose LumiSource™ BSGS?
- 15 years of performance and reliability
- Economy of scale solution for fab-wide delivery
- Optimized for high flow rate delivery of NH3
- Full redundancy when installed as a pair Part of
- “Source to Chamberˮ portfolio
- User friendly software used in all our products
Applications
LumiSource™ BSGS 3000 serves fab-wide delivery of low pressure, bulk specialty gases such as NH3, used in semiconductor, solar, and LED processes that consume gas at high flow rates or many points of use in the fab. Reliability and redundancy are prerequisites of fab-wide gas supply, and dual LumiSource™ BSGS 3000 systems combine the key ingredients to meet safety, flow rate demand, and production uptime
Features
- Dual source, auto-switch gas delivery
- Low pressure, high flow rate, valve design
- Measures product weight and pressure
- 1ˮ UHP plumbing with on-board JT heaters
- On-board purge and evacuation circuits
- Source pigtail isolation box – (not shown)
Download Brochure
Download Brochure
- Filename
- Ceres-LumiSource-Bulk Specialty Gas System.pdf
- Size
- 1 MB
- Format
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