NanoPurge Gas Cabinets are fully automated, 2-cylinder delivery systems that can be configured for most hazardous production material (HPM) semiconductor gases.
From lecture bottles to industry standard cylinders, to multi-cylinder pallets, and bulk cylinders, Ceres has a NanoPurge solution that will suit your needs.
NanoPurge is SEMI compliant, and supports Class 1 Division 2 code compliance, as well as CGA G-13 storage and handling requirements.
Why choose NanoPurge® Gas Cabinet?
- Easily configurable for full range of hazardous gases
- “Set-and-forget” operation only requires cylinder changes
- Proven safe over 25 years in use
- Additional safety devices for specific gases or classifications
Configurations for high-pressure and low-pressure cylinder gases
• Auto-switch Process: 2 cylinders/ 1 process gas
• Process/Process: 2 cylinders/ 2 different process gases
• Process/Purge: 2 cylinders/1 process gas/1 purge gas
Applications
NanoPurge Gas Cabinet® provides a reliable, continuous supply of hazardous gases, delivering from HPM rooms to VMBs or process tools. The auto-switch feature ensures uninterrupted delivery, while low-pressure gas supply offers precise control for various industrial applications, including semiconductor manufacturing, chemical processing, and laboratory setups.
Features
- Up to 2 outlets, with optional coax monitoring for pyrophoric gases
- Omron PLC and Sysmac software
- Scales and Heating for Low Pressure Gases
- Automated purge and evacuation for safe cylinder change routines
- ¼” UHP SS VMB sticks
Download Brochure
Download Brochure
- Filename
- Ceres-NanoPurge-Gas Cabinet.pdf
- Size
- 896 KB
- Format
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