The VaporGen™ is a state-of the art, fully automated, standalone, vapor generation and flow control system. The system is designed to interface with CVD production equipment to deliver vapor directly to the point of process. VaporGen™ i2000 represents a product configuration that houses two patented SMR flash evaporators to generate and supply neat vapor from two different precursor chemical sources.
VaporGen™ is specifically designed to provide vapor on demand to multiple vapor mass flow control components, which in turn, deliver precise amounts of vapor to CVD reactors.
Why choose VaporGen™?
- Neat vapor generator by flash evaporation
- One vapor source can feed multiple points of use
- High capacity, on demand, near tool vapor supply
- Instant MFC response for superior process control
- Combines two vapor delivery systems into one user-friendly software used in our full portfolio
- SEMI S2 compliant and QMS ISO9001-2018
Applications
The VaporGen™ i2000 is ideal for sub fab or near tool vapor delivery. SMR flash evaporation supports multiple process MFCs, even multiple tools. VaporGen™ systems are well-suited for processes with long process run times. Flash evaporation can be an alternative to direct liquid injection vaporization, which can only feed one point of use. VaporGen™ features real-time liquid refill from ChemSource™ precursor delivery systems.
Features
- Patented SMR vapor generation and supply
- Steady state vapor supply for long process runs
- Hot Box temp control for all vapor plumbing
- On-board maintenance circuits for push gas, purge gas, vent and vacuum functions
- Safety-rated for flammables and pyrophorics
Download Brochure
Download Brochure
- Filename
- Ceres-VaporGen i2000-Vapor Delivery System.pdf
- Size
- 853 KB
- Format
Contact our experts
Reach out to our expert teams today to discover how VaporStation® can revolutionize your vapor delivery processes.